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The CR series is an air-cooled roots type dry vacuum pump. Boasting stable operation and excellent water vapor handling the CR pump is an excellent solution for both clean and wet processes including vacuum dryers, sputtering, and evaporation systems. Conforms to rigorous CE and cTUVus standards.
ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption by attaching to the dry pump exhaust line. ECO-SHOCK is available for dry pump models that mainly pump inert gas. Primarily used at Semiconductor and Flat Panel Display manufacturing facilities.
Heliot 900 series has the worlds fastest pumping speed for helium and uses a tablet type user-friendly operator interface that provides the best flexible performance for all of your helium leak testing applications.
ULVAC’s unique approach to utiizing the latent heat in the pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused it’s design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this family of pumps optimal for CVD and etch applications. Compatbile with ULVAC’s ECO-SHOCK system for additional energy savings.
ULVAC has introduced the LS Series Dry Screw Pump, the first pump of its kind in the ULVAC components line-up. With built in silencer, and ULVAC’s own ECO-SHOCK technology the LS Series achieves high pumping speeds while humming along at less than 61 dB(A) and an industry leading 0.6kW or less at Ultimate Pressure (LS120A-C). The LS Series is built to save you money and time, with high pumping speeds close to atmospheric pressure your pump down time is reduced by as much as 20%.
