LR/HR/UR Series
ULVAC’s unique approach to utiizing the latent heat in the pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused it’s design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this family of pumps optimal for CVD and etch applications. Compatbile with ULVAC’s ECO-SHOCK system for additional energy savings.
